中国物理学会高能物理分会第十三届全国粒子物理学术会议（2021）

The Institute of High Energy Physics of Chinese Academy of Sciences (IHEP, CAS) has designed two types of LGAD sensors, which are produced in the Novel Device Laboratory (NDL) and Institute of Microelectronics (IME) respectively. The sensors of the two foundries were irradiated with the neutron fluences of 0.8e15, 1.5e15 and 2.5e15 neq/cm2 in Institut Jozef Stefan (JSI). The timing resolution and collected charge of the LGAD sensors were measured with electrons from a beta source. After irradiation with a fluence of 2.5e15 neq/cm2, the collected charge of the IHEP-NDL (IHEP-IME) sensor can be greater than 7 (11) fC, and the timing resolution is better than 40 (50) ps.