中国物理学会高能物理分会第十一届全国会员代表大会暨学术年会

Low Gain Avalanche Detector (LGAD) with time resolution better than 50 ps has been choose as the sensors for ATLAS High Granularity Timing Detector (HGTD) project and have so far been developed by several institutes. This poster will show measurement results of carbon implantation LGAD sensors designed by the Institute of High Energy Physics (IHEP) and fabricated by Institute of Micro Electronics (IME). The time resolution of IHEP-IME LGAD sensors are better than 35 ps and the collected charges are larger than 30 fC before irradiation. After irradiation fluence of 2.5 × 1015 neq/cm2, the collected charges of the IHEP-IMEv2 LGAD reaches 4 fC with a time resolution of better than 50 ps at 400 V. The operating voltage of the IHEP-IMEv2 sensors can effectively avoid the single event burnout effect.