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低温晶体量热器中NTD-Ge热传感器的制备和特性研究

Not scheduled
20m
Poster 粒子物理实验技术 墙报展及评选

Speaker

明萱 薛 (University of Science and Technology of China)

Description

中子嬗变掺杂锗NTD-Ge是通过中子辐照及相应的嬗变掺杂过程产生具有十分均匀掺杂分布的锗半导体,在极低温度下其电阻对温度变化十分灵敏,且具有信号读出相对简单、大动态范围等独特优势,广泛应用于低温晶体量热器的热传感器。我们在中国先进研究堆对一批10N 纯度的高纯锗进行了热中子辐照,经过放射性冷却之后,对NTD-Ge的热中子辐照剂量、中子辐照缺陷以及载流子浓度等关键特性进行了测量研究。探索制定了NTD-Ge热传感器的电极制备流程,涉及表面抛光、离子注入、真空镀膜等多种微纳加工工艺,并解决了NTD-Ge金属电极粘附性差的问题。利用搭建的NTD-Ge极低温测试系统,对制备的NTD-Ge热传感器的极低温电阻-温度性能进行了测量,得到最低~20 mK低温下NTD-Ge的R-T特性符合理论预期的优良结果。

Primary authors

明萱 薛 (University of Science and Technology of China) Kangkang Zhao (University of Science and Technology of China)

Presentation materials

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